| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Michel J. Lacombat, Steve Wittekoek |
| Title | Optical Microlithography and Metrology for Microcircuit Fabrication |
| Publisher | SPIE - The International Society for Optical Engineering |
| Year | 1989 |
| Languages | eng |
| Isbn | 0819401749 |
| Series | SPIE Proceedings |
| Volume | 1138 |
| Record date | 20250508 |
| Notes | 27-28 April 1989, Paris, France |