| Shelfclass_id | 6.A |
| Sortkey | MADOU, MARC J. |
| Authors | Marc J. Madou |
| Title | Fundamentals of Microfabrication and Nanotechnology, Volume II: Manufacturing Techniques for Microfabrication and Nanotechnology |
| Publisher | CRC Press |
| Edition | 3rd |
| Year | 2012 |
| Languages | eng |
| Isbn | 9781420055191 |
| Record date | 20220411 |