| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Martin C. Peckerar, Michael T. Postek Jr. |
| Title | Nanostructure Science, Metrology, and Technology: 5-7 September 2001, Gaithersburg, USA |
| Publisher | SPIE Optical Engineering Press |
| Year | 2002 |
| Languages | eng |
| Isbn | 0819443476 |
| Series | SPIE Proceedings |
| Volume | 4608 |
| Issn | 99-0108644 |
| Description | 278 s. |
| Record date | 20100821 |
| Location | Bellingham, Wash., USA |