| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Anthony N. Pirri, Bernhard P. Piwczyk |
| Title | Excimer Beam Applications: 6 September 1988, Boston, Massachusetts |
| Publisher | Spie |
| Year | 1988 |
| Languages | eng |
| Isbn | 0819400335 |
| Series | SPIE Proceedings |
| Volume | 998 |
| Description | vi, 128 p. ill. 28 cm. |
| Record date | 20090825 |
| Location | Bellingham, Wash., USA |
| Keywords | Excimer lasers |