| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Phillip D. Blais |
| Title | Submicron Lithography: March 29-30, 1982, Santa Clara, California |
| Publisher | SPIE - The International Society for Optical Engineering |
| Year | 1982 |
| Languages | eng |
| Isbn | 0892523689 |
| Series | SPIE Proceedings |
| Volume | 333 |
| Description | viii, 179 p. 28 cm. |
| Record date | 20130826 |
| Location | Bellingham, Wash. |