| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Natale M. Ceglio |
| Title | Multilayer Optics for Advanced X-Ray Applications: 22-23 July 1991, San Diego, California |
| Publisher | SPIE Optical Engineering Press |
| Year | 1992 |
| Languages | eng |
| Isbn | 0819406759 |
| Series | SPIE Proceedings |
| Volume | 1547 |
| Description | 242 s. |
| Record date | 20090721 |
| Location | Bellingham, Wash., USA |
| Keywords | Soft x-ray projection lithography, SXPL, Multilayer mirrors, Mikrolitografi, Microlithography, Konferenspublikationer, Conference proceedings |