| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Richard R. A. Syms |
| Title | Micro-Opto-Electro-Mechanical Systems: 22-23 May 2000, Glasgow, Scotland, United Kingdom |
| Publisher | SPIE Optical Engineering Press |
| Year | 2000 |
| Languages | eng |
| Isbn | 0819437123 |
| Series | SPIE Proceedings |
| Volume | 4075 |
| Description | 192 s. |
| Record date | 20090819 |
| Location | Bellingham, Wash., USA |
| Notes | Proceedings Europto Series |