| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Bodil Braren |
| Title | Lasers in Microelectronic Manufacturing: 10-11 September 1991, San Jose, California |
| Publisher | SPIE Optical Engineering Press |
| Year | 1991 |
| Languages | eng |
| Isbn | 0819407291 |
| Series | SPIE Proceedings |
| Volume | 1598 |
| Description | 240 s. |
| Record date | 20090721 |
| Location | Bellingham, Wash., USA |
| Keywords | Laserteknik, Laser technology, Mikroelektronik, Microelectronics, Konferenspublikationer, Conference proceedings |