| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | M. Edward Motamedi, Larry J. Hornbeck, Kristofer S. J. Pister |
| Title | Miniaturized Systems with Micro-Optics and Micromechanics II: 10-12 February 1997, San Jose, California |
| Publisher | SPIE Optical Engineering Press |
| Year | 1997 |
| Languages | eng |
| Isbn | 0819424196 |
| Series | SPIE Proceedings |
| Volume | 3008 |
| Description | 382 s. |
| Record date | 20090730 |
| Location | Bellingham, Wash., USA |