| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Michael T. Postek |
| Title | Integrated Circuit Metrology, Inspection, and Process Control VI: 9-11 March 1992, San Jose, California |
| Publisher | SPIE Optical Engineering Press |
| Year | 1992 |
| Languages | eng |
| Isbn | 081940828X |
| Series | SPIE Proceedings |
| Volume | 1673 |
| Description | 697 s. |
| Record date | 20090827 |
| Location | Bellingham, Wash., USA |
| Keywords | Automatisk mätteknik (Elektronik), Automatic measurements (Electronic engineering), Integrerade kretsar, Integrated circuits, Konferenspublikationer, Conference proceedings |