| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | M. Edward Motamedi, Rolf Göring |
| Title | Miniaturized Systems with Micro-Optics and Micromechanics III: 26-27 January 1998, San Jose, California |
| Publisher | SPIE Optical Engineering Press |
| Year | 1998 |
| Languages | eng |
| Isbn | 0819427152 |
| Series | SPIE Proceedings |
| Volume | 3276 |
| Description | 282 s. |
| Record date | 20090731 |
| Location | Bellingham, Wash., USA |