| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | M. Edward Motamedi |
| Title | Miniaturized Systems with Micro-Optics and Micromechanics: 30-31 January 1996, San Jose, California |
| Publisher | SPIE Optical Engineering Press |
| Year | 1996 |
| Languages | eng |
| Isbn | 0819420611 |
| Series | SPIE Proceedings |
| Volume | 2687 |
| Description | 168 s. |
| Record date | 20090728 |
| Location | Bellingham, Wash., USA |
| Keywords | Micro-optics, Micromechanics, Scanners, Actuators, Mikromaskinbearbetning, Micromachining, Konferenspublikationer, Conference proceedings |