| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Norbert Meyendorf, George Y. Baaklini, Bernd Michel |
| Title | Nondestructive Evaluation and Reliability of Micro- and Nanomaterial Systems: 18-19 March 2002, San Diego, USA |
| Publisher | SPIE Optical Engineering Press |
| Year | 2002 |
| Languages | eng |
| Isbn | 0819444510 |
| Series | SPIE Proceedings |
| Volume | 4703 |
| Issn | 99-0108644 |
| Description | 228 s. |
| Record date | 20100823 |
| Location | Bellingham, Wash., USA |