Shelfclass_id |
S/SPIE |
Sortkey |
S/SPIE |
Authors |
Mehrdad M. Moslehi, Rajendra Singh, Dim-Lee Kwong |
Title |
Rapid Thermal and Integrated Processing: 10-11 September 1991, San Jose, California |
Publisher |
SPIE Optical Engineering Press |
Year |
1992 |
Languages |
eng |
Isbn |
0819407267 |
Series |
SPIE Proceedings |
Volume |
1595 |
Issn |
99-0108644 |
Description |
207 s. |
Record date |
20100810 |
Location |
Bellingham, Wash., USA |
Keywords |
Temperature measurement, Chemical vapour deposition, Ion implantation, Rapid thermal processing, Halvledarteknik, Semiconductor engineering, Konferenspublikationer, Conference proceedings |