| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Mehrdad M. Moslehi, Rajendra Singh, Dim-Lee Kwong |
| Title | Rapid Thermal and Integrated Processing: 10-11 September 1991, San Jose, California |
| Publisher | SPIE Optical Engineering Press |
| Year | 1992 |
| Languages | eng |
| Isbn | 0819407267 |
| Series | SPIE Proceedings |
| Volume | 1595 |
| Issn | 99-0108644 |
| Description | 207 s. |
| Record date | 20100810 |
| Location | Bellingham, Wash., USA |
| Keywords | Temperature measurement, Chemical vapour deposition, Ion implantation, Rapid thermal processing, Halvledarteknik, Semiconductor engineering, Konferenspublikationer, Conference proceedings |