| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | John D. Cuthbert |
| Title | Optical/Laser Microlithography: Part 1/2: 3-5 March 1993, San Jose, California |
| Publisher | SPIE Optical Engineering Press |
| Year | 1993 |
| Languages | eng |
| Isbn | 0819411612 |
| Series | SPIE Proceedings |
| Volume | 1927:1/2 |
| Description | 2 vol. |
| Record date | 20090723 |
| Location | Bellingham, Wash., USA |
| Keywords | Mikrolitografi, Microlithography, Konferenspublikationer, Conference proceedings |