| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | James Bondur, Gary Castleman, Lloyd R. Harriott, Terry R. Turner |
| Title | Advanced Techniques for Integrated Circuit Processing II: 21-23 September 1992, San Jose, California |
| Publisher | SPIE Optical Engineering Press |
| Year | 1993 |
| Languages | eng |
| Isbn | 0819410012 |
| Series | SPIE Proceedings |
| Volume | 1803 |
| Issn | 99-0108644 |
| Description | 404 s. |
| Record date | 20100811 |
| Location | Bellingham, Wash., USA |
| Keywords | Integrerade kretsar, Integrated circuits, Konferenspublikationer, Conference proceedings |