| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Heidi Ottevaere, Peter DeWolf, Diederik S. Wiersma |
| Title | Nano- and Micro-Metrology: 16-17 June 2005, Munich, Germany |
| Publisher | Spie |
| Year | 2005 |
| Languages | eng |
| Isbn | 0819458589 |
| Series | SPIE Proceedings |
| Volume | 5858 |
| Description | 1 v. (various pagings) ill. 28 cm. |
| Record date | 20090902 |
| Location | Bellingham, Wash. |
| Keywords | Optical measurements |
| Urlnote | Table of contents only |
| Urls | http://www.loc.gov/catdir/toc/fy0710/2005284352.html |