Shelfclass_id | S/SPIE |
Sortkey | S/SPIE |
Authors | Christophe Gorecki |
Title | Optical Inspection and Micromeasurements: 10-14 June 1996, Besançon, France |
Publisher | SPIE Optical Engineering Press |
Year | 1996 |
Languages | eng |
Isbn | 0819421685 |
Series | SPIE Proceedings |
Volume | 2782 |
Issn | 99-0108644 |
Description | 846 s. |
Record date | 20100817 |
Location | Bellingham, Wash., USA |
Keywords | Microtopographic inspection, Sensors, Near-field microscopy, Teknisk optik, Applied optics |
Notes | EUROPTO Series |