| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Christophe Gorecki |
| Title | Optical Inspection and Micromeasurements: 10-14 June 1996, Besançon, France |
| Publisher | SPIE Optical Engineering Press |
| Year | 1996 |
| Languages | eng |
| Isbn | 0819421685 |
| Series | SPIE Proceedings |
| Volume | 2782 |
| Issn | 99-0108644 |
| Description | 846 s. |
| Record date | 20100817 |
| Location | Bellingham, Wash., USA |
| Keywords | Microtopographic inspection, Sensors, Near-field microscopy, Teknisk optik, Applied optics |
| Notes | EUROPTO Series |