| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Christopher J. Progler |
| Title | Optical Microlithography XIV: Part 1/2: 27 February - 2 March 2001, Santa Clara, USA |
| Publisher | Spie |
| Year | 2001 |
| Languages | eng |
| Isbn | 0819440329 |
| Series | SPIE Proceedings |
| Volume | 4346:1/2 |
| Issn | 1047-9899 |
| Description | 2 v. (xxxi, 1652 p.) ill. 28 cm. |
| Record date | 20100820 |
| Location | Bellingham, Wash. |
| Keywords | Integrated circuits, Microlithography, X-ray lithography, Manufacturing processes |