| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Editors: Fred H. Pollak, Robert S. Bauer |
| Title | Spectroscopic Characterization Techniques for Semiconductor Technology: 9-10, November 1983, Cambridge, Massachusetts |
| Publisher | SPIE - The International Society for Optical Engineering |
| Year | 1984 |
| Languages | eng |
| Isbn | 0892524871 |
| Series | SPIE Proceedings |
| Volume | 452 |
| Description | vi, 201 p. 28 cm. |
| Record date | 20130826 |
| Location | Bellingham, Wash. |