Spectroscopic Characterization Techniques for Semiconductor Technology: 9-10, November 1983, Cambridge, Massachusetts

Shelfclass_id S/SPIE
Sortkey S/SPIE
Authors Editors: Fred H. Pollak, Robert S. Bauer
Title Spectroscopic Characterization Techniques for Semiconductor Technology: 9-10, November 1983, Cambridge, Massachusetts
Publisher SPIE - The International Society for Optical Engineering
Year 1984
Languages eng
Isbn 0892524871
Series SPIE Proceedings
Volume 452
Description vi, 201 p. 28 cm.
Record date 20130826
Location Bellingham, Wash.