| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Editor: John C. Stover |
| Title | Flatness, Roughness, and Discrete Defects Characterization for Computer Disks, Wafers, and Flat Panel Displays II: 29-30 January 1998, San Jose, California |
| Publisher | SPIE - The International Society for Optical Engineering |
| Year | 1998 |
| Languages | eng |
| Isbn | 0819427144 |
| Series | SPIE Proceedings |
| Volume | 3275 |
| Issn | 0277-786X |
| Description | vii, 186 p. ill. 28 cm. |
| Record date | 20130909 |
| Location | Bellingham, Wash. |