| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Editor: Jim Dey |
| Title | Semiconductor Microlithography VI: March 30-31, 1981, San Jose, California |
| Publisher | SPIE - The International Society for Optical Engineering |
| Year | 1981 |
| Languages | eng |
| Isbn | 0892523085 |
| Series | SPIE Proceedings |
| Volume | 275 |
| Description | vi, 221 p. 28 cm. |
| Record date | 20130825 |
| Location | Bellingham, Wash. |