| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Russell A. Lawton |
| Title | MEMS Reliability for Critical Applications: 20 September 2000, Santa Clara, USA |
| Publisher | SPIE Optical Engineering Press |
| Year | 2000 |
| Languages | eng |
| Isbn | 0819438367 |
| Series | SPIE Proceedings |
| Volume | 4180 |
| Description | 146 s. |
| Record date | 20090819 |
| Location | Bellingham, Wash., USA |