| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Vijay K. Varadan |
| Title | Smart Structures and Materials 2001: Smart Electronics and MEMS: 5-7 March 2001, Newport Beach, USA |
| Publisher | Spie |
| Year | 2001 |
| Languages | eng |
| Isbn | 0819440205 |
| Series | SPIE Proceedings |
| Volume | 4334 |
| Description | viii, 392 p. ill. 28 cm. |
| Record date | 20090820 |
| Location | Bellingham, Washington |
| Keywords | Microelectronics, Smart materials, Microelectromechanical systems, Actuators |