| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Wayne Bailey, M. Edward Motamedi, Fang-Chen Luo |
| Title | Microelectronic Structures and Microelectromechanical Devices for Optical Processing and Multimedia Applications: 24 October 1995, Austin, Texas |
| Publisher | SPIE Optical Engineering Press |
| Year | 1995 |
| Languages | eng |
| Isbn | 0819420077 |
| Series | SPIE Proceedings |
| Volume | 2641 |
| Issn | 99-0108644 |
| Description | 154 s. |
| Record date | 20100816 |
| Location | Bellingham, Wash., USA |
| Keywords | Optical processing, Multimedia, Mirrors, Mikromaskinbearbetning, Micromachining, Konferenspublikationer, Conference proceedings |