| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Yuli Vladimirsky |
| Title | Emerging Lithographic Technologies III: Part 2/2: 15-17 March 1999, Santa Clara, California |
| Publisher | SPIE Optical Engineering Press |
| Year | 1999 |
| Languages | eng |
| Isbn | 0819431508 |
| Series | SPIE Proceedings |
| Volume | 3676:2/2 |
| Issn | 1047-9899 |
| Description | 2 vol. |
| Record date | 20100818 |
| Location | Bellingham, Wash., USA |