| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Editors: Orest J. Glembocki, Fred H. Pollak, Fernando Ponce |
| Title | Spectroscopic Characterization Techniques for Semiconductor Technology III: 14-15 March 1988, Newport Beach, California |
| Publisher | SPIE - The International Society for Optical Engineering |
| Year | 1988 |
| Languages | eng |
| Isbn | 0892529814 |
| Series | SPIE Proceedings |
| Volume | 946 |
| Description | viii, 234 p. ill. 28 cm. |
| Record date | 20130902 |
| Location | Bellingham, Wash. |