| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Ih-Chin Chen, Girish A. Dixit, Trung T. Doan, Nobuo Sasaki |
| Title | Microelectronic Device and Multilevel Interconnection Technology: 25-26 October 1995, Austin, Texas |
| Publisher | SPIE Optical Engineering Press |
| Year | 1995 |
| Languages | eng |
| Isbn | 0819420026 |
| Series | SPIE Proceedings |
| Volume | 2636 |
| Issn | 99-0108644 |
| Description | 326 s. |
| Record date | 20100816 |
| Location | Bellingham, Wash., USA |
| Keywords | Submicron devices, Memory, Interconnection technology, Mikroelektronik, Microelectronics, Konferenspublikationer, Conference proceedings |