| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Editors: Devendra K. Sadana, Carl M. Lampert |
| Title | Advanced Semiconductor Processing and Characterization of Electronic and Optical Materials: January 24-25, 1984, Los Angeles, California |
| Publisher | SPIE - The International Society for Optical Engineering |
| Year | 1984 |
| Languages | eng |
| Isbn | 0892524987 |
| Series | SPIE Proceedings |
| Volume | 463 |
| Description | vi, 147 p. 28 cm. |
| Record date | 20130827 |
| Location | Bellingham, Wash. |