| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Timothy A. Brunner |
| Title | Optical/Laser Microlithography VII: 2-4 March 1994, San Jose, California |
| Publisher | SPIE Optical Engineering Press |
| Year | 1994 |
| Languages | eng |
| Isbn | 0819414921 |
| Series | SPIE Proceedings |
| Volume | 2197 |
| Description | 1008 s. |
| Record date | 20090725 |
| Location | Bellingham, Wash., USA |
| Keywords | Mikrolitografi, Microlithography, Konferenspublikationer, Conference proceedings |