| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | James Bondur, Terry R. Turner |
| Title | Advanced Techniques for Integrated Circuit Processing: 1-5 October 1990, Santa Clara, California |
| Publisher | SPIE Optical Engineering Press |
| Year | 1991 |
| Languages | eng |
| Isbn | 0819404616 |
| Series | SPIE Proceedings |
| Volume | 1392 |
| Issn | 99-0108644 |
| Description | x, 690 s. |
| Record date | 20100810 |
| Location | Bellingham, Wash., USA |
| Keywords | Integrerade kretsar, Integrated circuits, Konferenspublikationer, Conference proceedings |