| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | M. Weck |
| Title | Micromachining of Elements with Optical and Other Submicrometer Dimensional and Surface Specifications: 2-3 April 1987, The Hague, The Netherlands |
| Publisher | Spie |
| Year | 1987 |
| Languages | eng |
| Isbn | 0892528389 |
| Series | SPIE Proceedings |
| Volume | 803 |
| Description | viii, 159 p. ill. 28 cm. |
| Record date | 20090824 |
| Location | Bellingham, Wash., USA |
| Keywords | Micromachining, Optical instruments |
| Notes | Papers delivered at a meeting held within the framework of the Fourth International Symposium on Optical and Optoelectronic Applied Sciences and Engineering, Hague, 30 Mar. to 3 Apr., 1987. |