| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Bernhard P. Piwczyk |
| Title | Excimer Laser Materials Processing and Beam Delivery Systems: 8-9 November 1990, Boston, Massachusetts |
| Publisher | SPIE Optical Engineering Press |
| Year | 1990 |
| Languages | eng |
| Isbn | 0819404446 |
| Series | SPIE Proceedings |
| Volume | 1377 |
| Description | 135 s. |
| Record date | 20090721 |
| Location | Bellingham, Wash., USA |
| Keywords | Excimer lasers |