| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Editor: Kevin M. Monahan |
| Title | Integrated Circuit Metrology, Inspection, and Process Control III: 27-28 February 1989, Los Angeles, California |
| Publisher | SPIE - The International Society for Optical Engineering |
| Year | 1989 |
| Languages | eng |
| Isbn | 0819401226 |
| Series | SPIE Proceedings |
| Volume | 1087 |
| Description | x, 535 p. ill. 28 cm. |
| Record date | 20130907 |
| Location | Bellingham, Wash. |