| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Marylyn Hoy Bennett |
| Title | Integrated Circuit Metrology, Inspection, and Process Controll VIII: 28 February - 2 March [1994], San Jose, California |
| Publisher | SPIE Optical Engineering Press |
| Year | 1994 |
| Languages | eng |
| Isbn | 0819414913 |
| Series | SPIE Proceedings |
| Volume | 2196 |
| Issn | 99-0108644 |
| Description | 553 s. |
| Record date | 20100813 |
| Location | Bellingham, Wash., USA |
| Keywords | Optical metrology, Metrology, Lithography, Photolithography, Automatisk mätteknik (Elektronik), Automatic measurements (Electronic engineering), Integrerade kretsar, Integrated circuits, Konferenspublikationer, Conference proceedings |