| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Editor: Alan D. Wilson |
| Title | X-Ray Lithography and Applications of Soft X-Rays to Technology: October 19-20, 1983, Upton, New York |
| Publisher | SPIE - The International Society for Optical Engineering |
| Year | 1984 |
| Languages | eng |
| Isbn | 0892524839 |
| Series | SPIE Proceedings |
| Volume | 448 |
| Description | vi, 140 p. 28 cm. |
| Record date | 20130826 |
| Location | Bellingham, Wash. |