| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | M. Edward Motamedi, Hans Peter Herzig |
| Title | Microelectronic Structures and MEMS for Optical Processing IV: 21-22 September 1998, Santa Clara, California |
| Publisher | SPIE Optical Engineering Press |
| Year | 1998 |
| Languages | eng |
| Isbn | 0819429724 |
| Series | SPIE Proceedings |
| Volume | 3513 |
| Description | vii, 240 p. ill. 28 cm |
| Record date | 20090804 |
| Location | Bellingham, Wash., USA |
| Keywords | Microelectronics, Microelectromechanical systems, Optoelectronics |