| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | William H. Arnold |
| Title | Integrated Circuit Metrology, Inspection, and Process Control IV: 5-6 March 1990, San Jose, California |
| Publisher | SPIE Optical Engineering Press |
| Year | 1990 |
| Languages | eng |
| Isbn | 0819403083 |
| Series | SPIE Proceedings |
| Volume | 1261 |
| Issn | 99-0108644 |
| Description | 528 s. |
| Record date | 20100809 |
| Location | Bellingham, Wash., USA |
| Keywords | Automatisk mätteknik (Elektronik), Automatic measurements (Electronic engineering), Integrerade kretsar, Integrated circuits, Konferenspublikationer, Conference proceedings |