| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Fusen E. Chen, Shyam P. Murarka |
| Title | Microelectronics Technology and Process Integration: 20-21 October 1994, Austin, Texas |
| Publisher | SPIE Optical Engineering Press |
| Year | 1994 |
| Languages | eng |
| Isbn | 0819416681 |
| Series | SPIE Proceedings |
| Volume | 2335 |
| Issn | 99-0108644 |
| Description | 292 s. |
| Record date | 20100813 |
| Location | Bellingham, Wash., USA |
| Keywords | Plasma etching, Metallisering (Halvledarteknik), Metallization (Semiconductor engineering), Konferenspublikationer, Conference proceedings |