| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Hiroshi Ito |
| Title | Advances in Resist Technology and Processing VIII: 4-5 March 1991, San Jose, California |
| Publisher | SPIE Optical Engineering Press |
| Year | 1991 |
| Languages | eng |
| Isbn | 0819405655 |
| Series | SPIE Proceedings |
| Volume | 1466 |
| Description | xii, 679 s. |
| Record date | 20090721 |
| Location | Bellingham, Wash., USA |
| Keywords | Microlithography, Tryckta kretsar, Printed circuits, Konferenspublikationer, Conference proceedings |