| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Russell A. Lawton, William M. Miller, Gisela Lin, Rajeshuni Ramesham |
| Title | MEMS Reliability for Critical and Space Applications: 21-22 September 1999, Santa Clara, California |
| Publisher | SPIE Optical Engineering Press |
| Year | 1999 |
| Languages | eng |
| Isbn | 0819434779 |
| Series | SPIE Proceedings |
| Volume | 3880 |
| Description | 176 s. |
| Record date | 20090806 |
| Location | Bellingham, Wash., USA |