| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Roger J. Malik, Chris J. Palmstrøm, Salah M. Bedair, Harold G. Craighead, Randall L. Kubena |
| Title | Advanced Semiconductor Epitaxial Growth Processes and Lateral and Vertical Fabrication: 23-26 March 1992, Somerset, New Jersey |
| Publisher | SPIE Optical Engineering Press |
| Year | 1992 |
| Languages | eng |
| Isbn | 0819408379 |
| Series | SPIE Proceedings |
| Volume | 1676 |
| Description | 238 s. |
| Record date | 20090722 |
| Location | Bellingham, Wash., USA |
| Keywords | Metal-organic chemical vapour deposition, Semiconductor alloys, Quantum wells, Chemical vapour deposition, Nanofabrication, Epitaxi (Halvledarteknik), Epitaxy (Semiconductor engineering), Konferenspublikationer, Conference proceedings |
| Notes | Palmström |