Advanced Processing of Semiconductor Devices: 23-25 March 1987, Bay Point, Florida

Shelfclass_id	S/SPIE
Sortkey	S/SPIE
Authors	Sayan D. Mukherjee
Title	Advanced Processing of Semiconductor Devices: 23-25 March 1987, Bay Point, Florida
Publisher	SPIE - The International Society for Optical Engineering
Year	1987
Languages	eng
Isbn	089252832X
Series	SPIE Proceedings
Volume	797
Description	x, 362 p. ill. 28 cm.
Record date	20090717
Location	Bellingham, Wash., USA
Keywords	Semiconductors