Shelfclass_id | S/SPIE |
Sortkey | S/SPIE |
Authors | Sayan D. Mukherjee |
Title | Advanced Processing of Semiconductor Devices: 23-25 March 1987, Bay Point, Florida |
Publisher | SPIE - The International Society for Optical Engineering |
Year | 1987 |
Languages | eng |
Isbn | 089252832X |
Series | SPIE Proceedings |
Volume | 797 |
Description | x, 362 p. ill. 28 cm. |
Record date | 20090717 |
Location | Bellingham, Wash., USA |
Keywords | Semiconductors |