| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Editor: James E. Griffiths |
| Title | Monitoring and Control of Plasma-Enhanced Processing of Semiconductors: 1-2 November 1988, Santa Clara, California |
| Publisher | SPIE - The International Society for Optical Engineering |
| Year | 1989 |
| Languages | eng |
| Isbn | 0819400726 |
| Series | SPIE Proceedings |
| Volume | 1037 |
| Description | viii, 147 p. ill. 28 cm. |
| Record date | 20130907 |
| Location | Bellingham, Wash. |