| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Kevin Chau, Sima Dimitrijev |
| Title | Device and Process Technologies for MEMS and Microelectronics: 27-29 October 1999, Royal Pines Resort, Queensland, Australia |
| Publisher | SPIE Optical Engineering Press |
| Year | 1999 |
| Languages | eng |
| Isbn | 0819434930 |
| Series | SPIE Proceedings |
| Volume | 3892 |
| Description | 394 s. |
| Record date | 20090806 |
| Location | Bellingham, Wash., USA |