| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Ray Roop, Kevin Chau |
| Title | Micromachined Devices and Components: 23-24 October 1995, Austin, Texas |
| Publisher | SPIE Optical Engineering Press |
| Year | 1995 |
| Languages | eng |
| Isbn | 0819420085 |
| Series | SPIE Proceedings |
| Volume | 2642 |
| Description | 296 s. |
| Record date | 20090828 |
| Location | Bellingham, Wash., USA |
| Keywords | Electromechanical devices, Micromechanics, Actuators, Sensors, Mikromaskinbearbetning, Micromachining, Konferenspublikationer, Conference proceedings |