| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Uwe F. W. Behringer, Deepak G. Uttamchandani |
| Title | MEMS Design, Fabrication, Characterization, and Packaging: 30 May-1 June 2001, Edinburgh, UK |
| Publisher | Spie |
| Year | 2001 |
| Languages | eng |
| Isbn | 0819441082 |
| Series | SPIE Proceedings |
| Volume | 4407 |
| Description | ix, 442 p. ill. 28 cm. |
| Record date | 20090820 |
| Location | Bellingham, Wash., USA |
| Keywords | Microelectromechanical systems, Microfabrication, Microelectronic packaging, Mechatronics |