| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Editor: John J. Lee Jr |
| Title | Applications of Optical Metrology - Techniques and Measurements II: April 7-8, 1983, Arlington, Virginia |
| Publisher | SPIE - The International Society for Optical Engineering |
| Year | 1983 |
| Languages | eng |
| Isbn | 0892524510 |
| Series | SPIE Proceedings |
| Volume | 416 |
| Description | vi, 214 p. 28 cm. |
| Record date | 20130826 |
| Location | Bellingham, Wash. |