Multilayer and Grazing Incidence X-Ray/EUV Optics for Astronomy and Projection Lithography: 19-22 July 1992, San Diego, California

Shelfclass_id S/SPIE
Sortkey S/SPIE
Authors Richard B. Hoover, Arthur B. C. Walker Jr.
Title Multilayer and Grazing Incidence X-Ray/EUV Optics for Astronomy and Projection Lithography: 19-22 July 1992, San Diego, California
Publisher SPIE Optical Engineering Press
Year 1993
Languages eng
Isbn 0819409154
Series SPIE Proceedings
Volume 1742
Description 702 s.
Record date 20090722
Location Bellingham, Wash., USA
Keywords AXAF grazing incidence mirrors, Grazing incidence optics, Multilayer mirrors, EUV, Projection lithography, Microlithography, Astronimiska instrument, Astromical instruments, Röntgenspektroskopi, X-ray spectroscopy, Konferenspublikationer, Conference proceedings