Shelfclass_id | S/SPIE |
Sortkey | S/SPIE |
Authors | Richard B. Hoover, Arthur B. C. Walker Jr. |
Title | Multilayer and Grazing Incidence X-Ray/EUV Optics for Astronomy and Projection Lithography: 19-22 July 1992, San Diego, California |
Publisher | SPIE Optical Engineering Press |
Year | 1993 |
Languages | eng |
Isbn | 0819409154 |
Series | SPIE Proceedings |
Volume | 1742 |
Description | 702 s. |
Record date | 20090722 |
Location | Bellingham, Wash., USA |
Keywords | AXAF grazing incidence mirrors, Grazing incidence optics, Multilayer mirrors, EUV, Projection lithography, Microlithography, Astronimiska instrument, Astromical instruments, Röntgenspektroskopi, X-ray spectroscopy, Konferenspublikationer, Conference proceedings |